Yabagi JA, Kimpa MI, Muhammad MN, Nayan N, Embong Z, Agam MA. Nanofabrication Process by Reactive Ion Etching of Polystyrene Nanosphere on Silicon Surface. jst [Internet]. 2017 Dec. 28 [cited 2026 Aug. 12];9(3). Available from: https://journal.uthm.edu.my/index.php/JST/article/view/2197